Microscopy of Semiconducting Materials

Microscopy of Semiconducting Materials

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With IC technology continuing to advance, the analysis of very small structures remains critically important. Microscopy of Semiconducting Materials provides an overview of advances in semiconductor studies using microscopy. The book explores the use of transmission and scanning electron microscopy, ultrafine electron probes, and EELS to investigate semiconducting structures. It also covers specimen preparation using focused ion beam milling and advances in microscopy techniques using different types of scanning probes, such as AFM, STM, and SCM. In addition, the book discusses a range of materials, from finished devices to partly processed materials and structures, including nanoscale wires and dots. This volume provides an authoritative reference for all academics and researchers in materials science, electrical and electronic engineering and instrumentation, and condensed matter physics.1999 Proceedings of the Institute of Physics Conference held 22-25 March 1999, University of Oxford, UK A.G Cullis, R Beanland ... for the former where cross- sectioning is required, location of individual circuit elements has become a particular problem. ... spatial resolution microanalysis, especially in combination with analytical methods such as advanced electron energy loss ... these types, together with much detailed work involving many more conventional microscopy applications.

Title:Microscopy of Semiconducting Materials
Author: A.G Cullis, R Beanland
Publisher:CRC Press - 2000-01-01

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